Forming dual metallization interconnect structures in single metallization level

ABSTRACT

Techniques are provided to fabricate metallic interconnect structures in a single metallization level, wherein different width metallic interconnect structures are formed of different metallic materials to eliminate or minimize void formation in the metallic interconnect structures. For example, a semiconductor device includes an insulating layer disposed on a substrate, and a first metallic line and a second metallic line formed in the insulating layer. The first metallic line has a first width, and the second metallic line has a second width which is greater than the first width. The first metallic line is formed of a first metallic material, and the second metallic line is formed of a second metallic material, which is different from the first metallic material. For example, the first metallic material is cobalt or ruthenium, and the second metallic material is copper.

TECHNICAL FIELD

This disclosure generally relates to semiconductor fabricationtechniques and, in particular, techniques for fabricating metallicinterconnect structures.

BACKGROUND

A semiconductor integrated circuit chip is typically fabricated with aback-end-of-line (BEOL) interconnect structure, which comprises multiplelevels of metal lines and inter-level metal vias, to connect variousintegrated circuit components and devices that are fabricated as part ofa front-end-of-line (FEOL) layer of the semiconductor integrated circuitchip. Current state of the art BEOL process technologies typicallyimplement copper to form BEOL interconnects, as the use of coppermaterial is known to significantly reduce resistance in the BEOLinterconnect structure, resulting in improved conduction and higherperformance. However, as copper interconnect structures are scaled downwith smaller widths and pitches, copper interconnects are prone to voidformation which takes place during copper filling of narrow trenches oropenings formed in an interlevel dielectric (ILD) layer. The formationof voids in copper interconnects causes an increase in the electricalresistance of such interconnects, which in turn results in an increaseof the RC delay of the integrated circuit.

SUMMARY

Embodiments of the invention include methods for fabricating metallicinterconnect structures in a single metallization level, whereindifferent width metallic interconnect structures are formed of differentmetallic materials to eliminate or minimize void formation in themetallic interconnect structures. For example, a method according to anembodiment of the invention comprises: forming an insulating layer on asubstrate; patterning the insulating layer to form a plurality of trenchopenings in the insulating layer, wherein the plurality of trenchopenings comprises a first trench opening having a first width, and asecond trench opening having a second width, which is greater than thefirst width; depositing a first layer of liner material to form a firstliner layer on sidewall and bottom surfaces of the first and secondtrench openings; depositing a first layer of metallic material to fillthe first trench opening with metallic material, wherein the metallicmaterial within the first trench opening comprises a first metallicline; forming an etch protection layer to protect the metallic materialwithin the first trench opening; performing an etch process to remove aportion of the first layer of metallic material within the second trenchopening, while the etch protection layer protects the metallic materialwithin the first trench opening from being etched during the etchprocess; and depositing a second layer of metallic material to fill thesecond trench opening with metallic material, wherein the metallicmaterial within the trench opening comprises a second metallic line.

Another embodiment of the invention includes a semiconductor devicewhich comprises an insulating layer disposed on a substrate, and a firstmetallic line and a second metallic line formed in the insulating layer.The first metallic line has a first width and the second metallic linehas a second width which is greater than the first width. The firstmetallic line is formed of a first metallic material, and the secondmetallic line is formed of a second metallic material, which isdifferent from the first metallic material. In one embodiment, the firstmetallic material comprises one of cobalt and ruthenium, and the secondmetallic material comprises one of copper and tungsten.

Other embodiments will be described in the following detaileddescription of embodiments, which is to be read in conjunction with theaccompanying figures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 through 11B schematically illustrate a method for fabricatingmetallic interconnect structures according to an embodiment of theinvention, wherein:

FIG. 1 is a schematic cross-sectional side view of a semiconductordevice at an intermediate stage of fabrication comprising an insulatinglayer formed on a substrate;

FIG. 2 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 1 after patterning the insulating layer to form aplurality of trench openings including narrow and wide trench openings;

FIG. 3 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 2 after forming a conformal liner layer over thesurface of the semiconductor device;

FIG. 4 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 3 after depositing a first layer metallic materialto fill the narrow trench openings in the insulating layer with metallicmaterial;

FIG. 5 is schematic cross-sectional side view of the semiconductordevice shown in FIG. 4 after planarizing the surface of thesemiconductor structure to remove the overburden portion of the firstlayer of metallic material disposed on the upper surface of theinsulating layer, and to form metallic lines in the narrow trenchopenings;

FIG. 6 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 5 after depositing a conformal etch protectionlayer over the surface of the semiconductor structure;

FIG. 7 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 6 after patterning the etch protection layer toremove the portion of the etch protection layer which covers the widetrench opening and expose a residual portion of the first layer ofmetallic material within the wide trench opening;

FIG. 8 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 7 after removing the residual portion of the firstlayer of metallic material within the wide trench opening;

FIG. 9 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 8 after depositing a second conformal liner layerand a seed layer to line the sidewall and bottom surfaces of the widetrench opening;

FIG. 10 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 9 after depositing a second layer metallic materialto fill the wide trench opening in the insulating layer with metallicmaterial; and

FIGS. 11A and 11B are schematic views of the semiconductor device shownin FIG. 9 after planarizing the surface of the semiconductor structuredown to the upper surface of the insulating layer to remove theoverburden portions of the second layer of metallic material and theconformal liner layer disposed on the upper surface of the insulatinglayer, and form a metallic line in the wide trench opening of theinsulating layer.

FIGS. 12-14 schematically illustrate a method for fabricating metallicinterconnect structures according to another embodiment of theinvention, wherein:

FIG. 12 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 4 after depositing a conformal etch protectionlayer over the first layer of metallic material;

FIG. 13 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 11 after patterning the etch protection layer toremove a portion of the etch protection layer which covers the widetrench opening, and expose a portion of the first layer of metallicmaterial within the wide trench opening; and

FIG. 14 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 12 after removing the portion of the first layer ofmetallic material within the wide trench opening.

DETAILED DESCRIPTION

Embodiments will now be described in further detail with regard tomethods for fabricating metallic interconnect structures in a singlemetallization level, wherein different width metallic interconnectstructures are formed of different metallic materials to eliminate orminimize void formation in the metallic interconnect structures. Asnoted above, the scaling down of copper interconnect structures renderscopper interconnects prone to void formation which takes place duringcopper filling of narrow trenches or openings formed in an ILD layer.The void formation in copper interconnects can occur for variousreasons. For example, copper interconnects require relatively thickdiffusion barrier layers to be formed on the sidewall and bottomsurfaces of the trenches and via openings formed in an ILD layer. Thethickness of the copper diffusion barrier layer cannot be scaled, andthe diffusion barrier layers must be deposited to ensure that there is aminimum thickness on all regions of the sidewall and bottom surfaces ofthe trenches and via openings. Diffusion barrier layers are typicallyformed using physical vapor deposition (PVD), which provides less thanoptimal step coverage. For narrow trenches and via openings with highaspect ratios, the step coverage of diffusion barrier layers becomeseven more problematic, leading to the deposition of more diffusionbarrier material at the upper regions of the trenches and via openings,and less diffusion barrier material toward the middle and bottom regionsof the trenches and via openings, thus reducing the width of the openingat the top of such features. With the reduced width at the top of thetrenches and via openings, copper “pinch-off” can occur during asubsequent copper fill process, leading to void formation in the coppermaterial within the trench or via opening.

Furthermore, copper interconnects are typically formed usingelectroplating methods (electro chemical deposition (ECD)). ECD coppercannot be formed directly on a diffusion barrier layer. Instead, acopper seed layer is typically formed on the diffusion barrier layerusing PVD or chemical vapor deposition (CVD), and then ECD copper isdeposited on the copper seed layer. However, as trench and via openingsare scaled down, it becomes more difficult to deposit uniform seedlayers over the diffusion barrier layer within the trench/via openingsusing PVD, leading to poor seed layer coverage. In some regions, theseed layer coverage can be non-existent, such that ECD copper does notdeposit on such regions, thereby resulting in the formation of voids inthe ECD copper at the sidewall and bottom surfaces of the trench/viaopenings. Furthermore, the non-uniform deposition of a PVD seed layercan result in the formation of thicker seed layers at the upper regionsof the trenches and via openings, further exacerbating the “pinch-off”phenomenon. Furthermore, the use of thick diffusion barrier layers andseed layers in narrow trenches and via openings consumes a large amountof area and volume, which reduces the amount (volume) of copper materialwithin such openings, leading to increased resistivity of the copperinterconnect structure.

In accordance with embodiments of the invention, metallic materialsother than copper are utilized to fill narrow trenches or via openingsin an insulating layer (e.g., ILD layer) to enable void-free formationof metallic interconnects in such narrow trenches and via openings. Thetypes of metals that are used to fill narrow trenches or via openings inaccordance with embodiments of the invention comprise metals which donot require thick diffusion barrier layers and seed layers formed on thediffusion barrier layers, but rather can be deposited in trenches andvia openings that are lined with relatively thin liner layers whichserve as adhesion and/or wetting layers. For example, as explained infurther detail below, metallic materials such as cobalt (Co) orruthenium (Ru), or alloys thereof, can be used to form a void-freemetallic interconnect structures in narrow trench and via openings of aninsulating layer.

It is to be understood that the various layers, structures, and regionsshown in the accompanying drawings are schematic illustrations that arenot drawn to scale. In addition, for ease of explanation, one or morelayers, structures, and regions of a type commonly used to formsemiconductor devices or structures may not be explicitly shown in agiven drawing. This does not imply that any layers, structures, andregions not explicitly shown are omitted from the actual semiconductorstructures. Furthermore, it is to be understood that the embodimentsdiscussed herein are not limited to the particular materials, features,and processing steps shown and described herein. In particular, withrespect to semiconductor processing steps, it is to be emphasized thatthe descriptions provided herein are not intended to encompass all ofthe processing steps that may be required to form a functionalsemiconductor integrated circuit device. Rather, certain processingsteps that are commonly used in forming semiconductor devices, such as,for example, wet cleaning and annealing steps, are purposefully notdescribed herein for economy of description.

Moreover, the same or similar reference numbers are used throughout thedrawings to denote the same or similar features, elements, orstructures, and thus, a detailed explanation of the same or similarfeatures, elements, or structures will not be repeated for each of thedrawings. It is to be understood that the terms “about” or“substantially” as used herein with regard to thicknesses, widths,percentages, ranges, etc., are meant to denote being close orapproximate to, but not exactly. For example, the term “about” or“substantially” as used herein implies that a small margin of error ispresent, such as 1% or less than the stated amount. Further, the terms“vertical” or “vertical direction” or “vertical height” as used hereindenote a Z-direction of the Cartesian coordinates shown in the drawings,and the terms “horizontal,” or “horizontal direction,” or “lateraldirection” as used herein denote an X-direction and/or Y-direction ofthe Cartesian coordinates shown in the drawings.

An illustrative embodiment of a method for fabricating metallicinterconnect structures will now be discussed in further detail withreference to FIGS. 1 through 11B, which schematically illustrate asemiconductor device at various stages of fabrication. To begin, FIG. 1is a schematic cross-sectional side view of a semiconductor device 100at an intermediate stage of fabrication comprising an insulating layerformed on a substrate. In particular, the semiconductor structure shownin FIG. 1 comprises a semiconductor substrate 110 (e.g., semiconductorwafer), a FEOL (front-end-of-line)/MOL (middle-of-line) structure 115formed on the semiconductor substrate 110, a capping layer 120, and aninsulating layer 125. While the semiconductor substrate 110 isillustrated as a generic substrate layer, it is to be understood thatthe semiconductor substrate 110 may comprise one of different types ofsemiconductor substrate structures and materials.

For example, in one embodiment, the semiconductor substrate 110 can be abulk semiconductor substrate (e.g., wafer) that is formed of silicon(Si) or germanium (Ge), or other types of semiconductor substratematerials that are commonly used in bulk semiconductor fabricationprocesses such as a silicon-germanium alloy, compound semiconductormaterials (e.g. III-V), etc. In another embodiment, the semiconductorsubstrate 110 may be an active semiconductor layer of an SOI(silicon-on-insulator) substrate, GeOI (germanium-on-insulator)substrate, or other type of semiconductor-on-insulator substrate, whichcomprises an insulating layer (e.g., oxide layer) disposed between abase substrate layer (e.g., silicon substrate) and the activesemiconductor layer (e.g., Si, Ge, etc.) in which active circuitcomponents are formed as part of the FEOL. It is to be noted that ineach drawing, the X-Y plane represents a plane that is parallel to theplane of the semiconductor substrate 110 (e.g., wafer) being processed.

The FEOL/MOL structure 115 comprises a FEOL layer formed on thesemiconductor substrate 110. The FEOL layer comprises varioussemiconductor devices and components that are formed in or on the activesurface of the semiconductor substrate 110 to provide integratedcircuitry for a target application. For example, the FEOL layercomprises field-effect transistor (FET) devices (such as FinFET devices,vertical FET devices, planar FET device, etc.), bipolar transistors,diodes, capacitors, inductors, resistors, isolation devices, etc., whichare formed in or on the active surface of the semiconductor substrate110. In general, FEOL processes typically include preparing thesemiconductor substrate 110 (or wafer), forming isolation structures(e.g., shallow trench isolation), forming device wells, patterning gatestructures, forming spacers, forming source/drain regions (e.g., viaimplantation), forming silicide contacts on the source/drain regions,forming stress liners, etc.

The FEOL/MOL structure 115 further comprises a MOL layer formed on theFEOL layer. In general, the MOL layer comprises a PMD (pre-metaldielectric layer) and conductive contacts (e.g., via contacts) that areformed in the PMD layer. The PMD layer is formed on the components anddevices of the FEOL layer. A pattern of openings is formed in the PMDlayer, and the openings are filled with a conductive material, such astungsten, to form conducive via contacts that are in electrical contactwith device terminals (e.g., source/drain regions, gate contacts, etc.)of the integrated circuitry of the FEOL layer. The conductive viacontacts of the MOL layer provide electrical connections between theintegrated circuitry of the FEOL layer and a first level ofmetallization of a BEOL structure that is formed on the FEOL/MOLstructure 115.

In the example process flow illustrated in FIG. 1, the capping layer 120and the insulating layer 125 are formed as part of an initial phase of aBEOL process module to form a first metallization level of a BEOLinterconnect structure. In this regard, the insulating layer 125 can beconsidered an interlevel dielectric layer (ILD) of a BEOL structure. Inanother embodiment, the insulating layer 125 may be a final orintermediate PMD layer of an MOL layer in which metallic interconnectsare formed to route electrical connections from the FEOL device to firstmetallization level of the BEOL structure.

The capping layer 120 comprises a layer of insulating/dielectricmaterial such as silicon nitride (SiN), silicon carbide (SiC), siliconcarbon nitride (SiCN), hydrogenated silicon carbide (SiCH), or amultilayer stack comprising the same or different types of dielectricmaterials, etc., or other suitable low-k dielectric materials which arenon-reactive with the metallic material that is used to form metallicinterconnect structures in the BEOL. In one example embodiment, thecapping layer 120 is formed with a thickness in a range of about 2 nm toabout 60 nm. The insulating layer 125 is formed of any suitabledielectric material that is commonly utilized in MOL or BEOL processtechnologies. For example, the insulating layer 125 can be formed of adielectric material including, but not limited to, silicon oxide (SiO₂),silicon nitride (e.g., (Si₃N₄), hydrogenated silicon carbon oxide(SiCOH), SiCH, SiCNH, or other types of silicon-based low-k dielectrics(e.g., k less than about 4.0), porous dielectrics, or known ULK(ultra-low-k) dielectric materials (with k less than about 2.5). Thethickness of the insulating 125 defines a vertical height (or thickness)of the metallization that is formed within the insulating layer 125,which will vary depending on the application. For example, in oneembodiment, the insulating layer 125 is formed with a thickness in arange of about 20 nm to about 800 nm. The capping layer 120 andinsulating layer 125 are formed using known deposition techniques, suchas, for example, ALD (atomic layer deposition), CVD (chemical vapordeposition) PECVD (plasma-enhanced CVD), or PVD (physical vapordeposition), or spin-on deposition.

Next, FIG. 2 is a schematic cross-sectional side view of thesemiconductor device shown in FIG. 1 after patterning the insulationlayer 125 to form a plurality of openings 125-1, 125-2 and 125-3 (e.g.,trench openings) in the insulating layer 125. In particular, in theexample embodiment, the openings 125-1 and 125-2 comprise narrowopenings which define narrow metal lines to be formed with a first widthW1 (minimum (1×) feature width), and the opening 125-3 comprises a wideopening which defines a wide metal line to be formed with a second widthW2, which is greater than W1. In one embodiment, the first width W1 isin a range of about 20 nm or less, and the second width W2 is in a rangeof about 2×W1 or greater. In the example embodiment of FIG. 2, the widthW1 of the openings 125-1 and 125-2 defines a “critical dimension” (CD)of metal wiring which is subsequently formed by filling the openings125-1 and 125-2 with metallic material. In this regard, the first widthW1 is fixed by the CD of the particular fabrication process that isimplemented, and the second width W2 can be, e.g., an integer multiple(e.g., 2×, 3×, etc.) of the first width W1.

For illustrative purposes, FIG. 2 shows the use of a single damasceneprocess in which metallic interconnect structures, e.g., metallic lines(wiring) and metallic vias (vertical interconnects) are separatelyformed in different insulating layers of a BEOL structure. In otherembodiments, openings can be etched in the insulating layer 125 andfilled with metallic material using one of various “dual” damascenepatterning techniques known in the art in which trenches and viaopenings are patterned in the same dielectric layer and concurrentlyfilled with metallic material. The dual damascene patterning methodsinclude a “via first” process, a “trench first” process, and a “buriedvia” process, each of which comprising different sequences for etchingthe insulating layer 125 to pattern the via openings and trenchopenings, while concurrently filling the via openings and trenchopenings with metallic material.

The damascene patterning of the insulating layer 125 can be implementedusing any conventional photolithography and etching process, e.g.,forming a photoresist mask on the upper surface of the insulating layer125 which comprises an image of the openings 125-1, 125-2, and 125-3 tobe etched into the sacrificial dielectric layer 125, followed by etchingthe dielectric material of the insulating layer 125 using a dry etchprocess such as RIE (reactive ion etching), which has an etch chemistrythat is suitable to etch the insulating layer 125 selective to theunderlying capping layer 120 (which serves as an etch protection layer).The capping layer 120 insulates the metallization from the underlyingPMD layer of the FEOL/MOL layer 115. However, in target locations wherethe metallization formed in the openings 125-1, 125-2, and 125-3 willmake contact to vertical contacts formed in the underlying FEOL/MOLlayer 115, the capping layer 120 can be patterned by etching openingsthrough the capping layer 120 at the bottom of the openings 125-1,125-2, 125-3 at such target locations.

Next, FIG. 3 is a schematic cross-sectional side view of thesemiconductor device shown in FIG. 2 after forming a thin conformalliner layer 130 over the surface of the semiconductor device. The thinconformal liner layer 130 comprises a layer of material which serves asan adhesion layer (or wetting layer) for metallic material (e.g., Co,Ru, etc.) that is deposited in the narrow trench openings 125-1 and125-2, and which serves as a diffusion barrier layer for metallicmaterial (e.g., copper) which is deposited in the wide trench opening125-3 to prevent the diffusion of metallic material in the wide trenchopening 125-3 into the surrounding dielectric material of the insulatinglayer 125. In one embodiment, the thin conformal liner layer 130 isformed of one or more of tantalum (Ta), titanium (Ti), tantalum nitride(TaN), titanium nitride (TiN), and other materials that are suitable toserve as adhesion layers and diffusion barrier layers. The thinconformal liner layer 130 can be a bi-layer film comprising Ta/TaN orTi/TiN, for example. The thin conformal liner layer 130 can be depositedusing any suitable technique such as ALD, CVD, PVD, etc., which enablesthe formation of an ultra-thin layers of liner material. In oneembodiment, the liner layer 130 is formed with a thickness in a range ofabout 0.5 nm to about 6 nm.

A next phase of the fabrication process comprises depositing a firstlayer of metallic material which is utilized to form metallicinterconnect structures (e.g., metallic lines) in the narrow trenchopenings 125-1 and 125-2 of the insulating layer 125, using a processflow as schematically illustrated in FIGS. 4 and 5. In particular, FIG.4 is a schematic cross-sectional side view of the semiconductor deviceshown in FIG. 3 after depositing a first layer of metallic material 140to fill the narrow trench openings 125-1 and 125-2 in the insulatinglayer 125 with the metallic material 140. The first layer of metallicmaterial 140 may comprise Ru, Co, an alloy of Co, an alloy of Ru, or anyother type of metallic material which is suitable for MOL or BEOLinterconnects, and which does not require a relatively thick diffusionbarrier layer to prevent diffusion of the metallic material 140 into theinsulating layer 125, nor an additional seed layer to facilitate thedeposition and filling of the metallic material 140 into the narrowtrench openings 125-1 and 125-2.

Instead, in the example embodiment shown in FIG. 4, only a thin linerlayer 130 is used as an adhesion (or wetting layer) to ensure properadhesion of the metallic material 140 to the insulating material on thesidewall and bottom surfaces of the narrow trench openings 125-1 and125-2. The metallic material 140 (e.g., Co or Ru) can be depositeddirectly on the liner layer 130 to form a void-free metallicinterconnect structure, while eliminating the need to use a thickdiffusion barrier layer and seed layer (as required with copper) whichcan lead to void formation for reasons as discussed above. The metaldeposition process is terminated after the narrow trench openings 125-1and 125-2 are filled with the metallic material 140, while the widertrench opening 125-3 is only partially filled with the metallic material140. The first layer of metallic material 140 can be deposited usingknown dry deposition techniques such as ALD, PVD or CVD.

Next, FIG. 5 is schematic cross-sectional side view of the semiconductordevice shown in FIG. 4 after planarizing the surface of thesemiconductor structure to remove the overburden portion of the firstlayer of metallic material 140 disposed on the upper surface of theinsulating layer 125, and form metallic lines 140-1 and 140-2 in thenarrow trench openings 125-1 and 125-2, respectively, of the insulatinglayer 125. The planarization process can be implemented using achemical-mechanical polish (CMP) process with a suitable etch slurry.While some residual portion of the first layer of metallic material 140remains in the wider trench opening 125-3 after completion of theplanarizing process, the residual material 140 is removed as part of thenext phase of the fabrication process which comprises forming a metallicinterconnect in the wider trench opening 125-3 using a process flow asschematically illustrated in FIG. 6 through FIG. 11B.

In particular, FIG. 6 is a schematic cross-sectional side view of thesemiconductor device shown in FIG. 5 after depositing a conformal etchprotection layer 145 over the surface of the semiconductor structure.The etch protection layer 145 can be formed of a material such as Ta,TaN, Ti, TiN, silicon oxide (e.g., SiO₂), silicon nitride (SiN), siliconcarbon nitride (SiCN), or any other material that is suitable to serveas an etch protection layer for the given process flow. Next, FIG. 7 isa schematic cross-sectional side view of the semiconductor device shownin FIG. 6 after patterning the etch protection layer 145 to remove theportion of the etch protection layer 145 which covers the wide trenchopening 125-3 and expose the residual portion of the first layer ofmetallic material 140 within the trench opening 125-3. The etchprotection layer 145 can be patterned using a process flow whichcomprises forming etch mask (e.g., photoresist mask) having an openingwhich exposes the portion of the etch protection layer 145 that coversthe trench opening 125-3, and then performing a dry etch process (e.g.,reactive ion etch (RIE) process) to etch away the exposed portion of theetch protection layer 145 and expose the residual portion of the firstlayer of metallic material 140 within the wide trench opening 125-3.

Next, FIG. 8 is a schematic cross-sectional side view of thesemiconductor device shown in FIG. 7 after removing the residual portionof the first layer of metallic material 140 within the wide trenchopening 125-3. In one embodiment, the residual metallic material 140 isremoved using a wet etch process having an etch chemistry which isconfigured to wet etch away the metallic material 140 within the widetrench opening 125-3 selective to materials of the etch protection layer145 and the portion of the liner layer 130 disposed on the sidewall andbottom surfaces of the wide trench opening 125-3. During the wet etchprocess, the etch protection layer 145 protects the metallicinterconnects 140-1 and 140-2 from the etching solution. In anotherembodiment, the residual portion of the first layer of metallic material140 within the trench opening 125-3 can be etched using a dry etchprocess (e.g., RIE) having an etch chemistry that is selective to themetallic material 140.

Next, FIG. 9 is a schematic cross-sectional side view of thesemiconductor device shown in FIG. 8 after depositing a second conformalliner layer 150 and a conformal seed layer 155 to line the sidewall andbottom surfaces of the wide trench opening 125-3. In one embodiment, thesecond conformal liner layer 150 is formed of the same material, e.g.,Ta, TaN, Ti, TiN, etc., as the conformal liner 130, and is deposited toserve as a diffusion barrier layer. The conformal liner layers 130 and150 in the wide trench opening 125-3 collectively serve as a relativelythick diffusion barrier layer (which is thicker than using the conformalliner layer 130 alone), which may be desirable to provide sufficientdiffusion barrier protection for the metallic material (e.g., copper),which is used to fill the wide trench opening 125-3.

The seed layer 155 is formed of a metallic material including, but notlimited to, copper (Cu), cobalt (Co), ruthenium (Ru), tungsten (W),aluminum (Al), iridium (Ir), rhodium (Rh), and alloys thereof, or anyother types of metallic material or alloys which are suitable to serveas a seeding layer for a subsequent electroplating process that is usedto fill the wide trench opening with metallic material. The seed layer155 is formed to serve as a plating seed layer in embodiments whereinmetallic material is deposited in the wide trench opening 125-3 usingelectroplating techniques. In one embodiment, the seed layer 155comprises a layer of copper that is deposited using PVD, for example.

A next phase of the fabrication process comprises depositing a secondlayer of metallic material which is utilized to form a metallicinterconnect structure in the wide trench opening 125-3 of theinsulating layer 125, using a process flow as schematically illustratedin FIGS. 10, 11A, and 11B. In particular, FIG. 10 is a schematiccross-sectional side view of the semiconductor device shown in FIG. 9after depositing a second layer metallic material 160 to fill the widetrench opening 125-3 in the insulating layer 125 with metallic material.FIGS. 11A and 11B are schematic views of the semiconductor device shownin FIG. 10 after planarizing (e.g., CMP) the surface of thesemiconductor structure down to the upper surface of the insulatinglayer 125 to form a metallic line 160-1 in the wide trench opening 125-3of the insulating layer 125. FIG. 11B is a schematic top plan view ofthe semiconductor structure shown in FIG. 11A, and FIG. 11A is aschematic cross-sectional side view of the semiconductor structure takenalong line 11A-11A in FIG. 11B. The planarizing process is performed toremove the overburden portions of the second layer of metallic material160, the seed layer 155, and the second conformal liner layer 150, aswell as the remaining portion of the etch protection layer 145 disposedon the upper surface of the insulating layer 125. The planarizingprocess can be performed using a sequence of CMP processes tosequentially remove the overburden layers 160, 155, 150, and 145,wherein each CMP process utilizes a slurry that is configured tochemically etch away the respective materials which form the layers 160,155, 150, and 145.

In one embodiment, the second layer of metallic material 160 comprisescopper, although other types of metallic material which are suitable forMOL or BEOL interconnects can be utilized to form the metallic line160-1. For example, the second layer of metallic material 160 can bealuminum (Al), tungsten (W), iridium (Ir), a copper alloy, etc. In oneembodiment, when the second layer of metallic material 160 comprisescopper, the copper material is deposited using a wet deposition processsuch as electroplating. In the exemplary embodiment as shown in FIG.11B, the W2 of the wide trench opening 125-3 is sufficiently wide suchthat metallic material (e.g., copper) can be readily deposited in thewide trench opening 125-3 without the formation of voids during thetrench filling process, despite the existence of the thick diffusionbarrier layer 130/150 and the seed layer 155.

FIGS. 12-14 schematically illustrate a method for fabricating metallicinterconnect structures according to another embodiment of theinvention. For illustrative purposes, it is assumed that the processflow begins with the semiconductor structure shown in FIG. 4, whereinFIG. 12 is a schematic cross-sectional side view of the semiconductordevice shown in FIG. 4 after depositing a conformal etch protectionlayer 245 over the first layer of metallic material 140. Similar to theetch protection layer 145 of FIG. 6, the etch protection layer 245 canbe formed of a material such as Ta, TaN, Ti, TiN, SiO, SiN, SiCN, or anyother types of materials that are suitable to serve as an etchprotection layer for the given process flow.

Next, FIG. 13 is a schematic cross-sectional side view of thesemiconductor device shown in FIG. 12 after patterning the etchprotection layer 245 to remove the portion of the etch protection layer245 which covers the wide trench opening 125-3 and expose a portion ofthe first layer of metallic material 140 within the trench opening125-3. The etch protection layer 245 can be lithographically patternedusing methods as discussed above with regard to the patterning of theetch protection layer 145 (FIG. 7).

Next, FIG. 14 is a schematic cross-sectional side view of thesemiconductor device shown in FIG. 13 after removing the portion of thefirst layer of metallic material 140 within the wide trench opening125-3. In one embodiment, the metallic material 140 is removed using awet etch process having an etch chemistry which is configured to wetetch away the metallic material 140 within the wide trench opening 125-3selective to materials of the etch protection layer 245 and the portionof the liner layer 130 which is disposed on the sidewall and bottomsurfaces of the wide trench opening 125-3. During the wet etch process,the etch protection layer 245 protects the metallic material in thenarrow trenches (which form the metallic interconnects 140-1 and 140-2)from the etching solution.

The process flow continues with the same or similar processing steps asdiscussed above with reference to FIGS. 9, 10 and 11A and 11B. Forexample, a second conformal liner layer and a seed layer can besequentially deposited over the surface of the semiconductor structureshown in FIG. 14 to line the sidewall and bottom surfaces of the widetrench opening 125-3, followed by deposition of a second layer ofmetallic material (e.g., copper) to fill the wide trench opening 125-3with metallic material. The semiconductor structure is then planarizeddown to the surface of the insulating layer 125 using CMP to remove theoverburden portions of the second layer of metallic material, the seedlayer, the second liner layer, the etch protection layer 245, and thefirst layer of metallic material 140, resulting in the semiconductordevice shown in FIGS. 11A and 11B.

It is to be understood that the methods discussed herein for fabricatingmetallic interconnect structures in MOL or BEOL layers can beincorporated within semiconductor processing flows for fabricatingvarious types of semiconductor devices and integrated circuits withvarious analog and digital circuitry or mixed-signal circuitry. Inparticular, integrated circuit dies can be fabricated with variousdevices such as field-effect transistors, bipolar transistors,metal-oxide-semiconductor transistors, diodes, capacitors, inductors,etc. An integrated circuit in accordance with the present invention canbe employed in applications, hardware, and/or electronic systems.Suitable hardware and systems for implementing the invention mayinclude, but are not limited to, personal computers, communicationnetworks, electronic commerce systems, portable communications devices(e.g., cell phones), solid-state media storage devices, functionalcircuitry, etc. Systems and hardware incorporating such integratedcircuits are considered part of the embodiments described herein. Giventhe teachings of the invention provided herein, one of ordinary skill inthe art will be able to contemplate other implementations andapplications of the techniques of the invention.

Although exemplary embodiments have been described herein with referenceto the accompanying figures, it is to be understood that the inventionis not limited to those precise embodiments, and that various otherchanges and modifications may be made therein by one skilled in the artwithout departing from the scope of the appended claims.

We claim:
 1. A method, comprising: forming an insulating layer on asubstrate; patterning the insulating layer to form a plurality of trenchopenings in the insulating layer, wherein the plurality of trenchopenings comprises a first trench opening having a first width, and asecond trench opening having a second width, which is greater than thefirst width; depositing a first layer of liner material to form a firstliner layer on sidewall and bottom surfaces of the first and secondtrench openings; depositing a first layer of metallic material to fillthe first trench opening with metallic material, wherein the metallicmaterial within the first trench opening comprises a first metallicline; forming an etch protection layer to protect the metallic materialwithin the first trench opening; performing an etch process to remove aportion of the first layer of metallic material within the second trenchopening, while the etch protection layer protects the metallic materialwithin the first trench opening from being etched during the etchprocess; and depositing a second layer of metallic material to fill thesecond trench opening with metallic material, wherein the metallicmaterial within the second trench opening comprises a second metallicline; wherein the metallic material of the second layer of metallicmaterial is different from the metallic material of the first layer ofmetallic material.
 2. The method of claim 1, wherein the first layer ofmetallic material comprises cobalt.
 3. The method of claim 1, whereinthe first layer of metallic material comprises ruthenium.
 4. The methodof claim 1, wherein the second layer of metallic material comprisescopper.
 5. The method of claim 1, wherein the second width is at leasttwo times greater than the first width.
 6. The method of claim 5,wherein the first width is about 20 nm or less.
 7. The method of claim1, wherein the first layer of liner material comprises one of tantalum,titanium, tantalum nitride, and titanium nitride.
 8. The method of claim1, further comprising depositing a second layer of liner material toform a second liner layer on the first liner layer on the sidewall andbottom surfaces of the second trench opening, prior to depositing thesecond layer of metallic material.
 9. The method of claim 8, furthercomprising depositing a metallic seed layer on the second liner layer inthe second trench opening, prior to depositing the second layer ofmetallic material.
 10. The method of claim 1, wherein performing theetch process comprises performing a wet etch process with an etchchemistry that is configured to etch the portion of the first layer ofmetallic material within the second trench opening selective to the etchprotection layer and the first liner layer.
 11. The method of claim 1,wherein forming the etch protection layer to protect the metallicmaterial within the first trench opening, comprises: removing anoverburden portion of the first layer of metallic material disposed onan upper surface of the insulating layer; depositing a conformal layerof etch protection material; and patterning the conformal layer of etchprotection material to remove a portion of the conformal layer of etchprotection material which covers the second trench opening and exposethe portion of the first layer of metallic material within the secondtrench opening.
 12. The method of claim 1, wherein forming the etchprotection layer to protect the metallic material within the firsttrench opening, comprises: depositing a conformal layer of etchprotection material over the first layer of metallic material; andpatterning the conformal layer of etch protection material to remove aportion of the conformal layer of etch protection material which coversthe second trench opening and expose the portion of the first layer ofmetallic material within the second trench opening.
 13. The method ofclaim 1, wherein the insulating layer comprises an interlayer dielectriclayer of a back-end-of-line structure.
 14. The method of claim 1,wherein the insulating layer comprises a pre-metal dielectric layer of amiddle-of-line structure.
 15. A method, comprising: forming aninsulating layer on a substrate; patterning the insulating layer to forma plurality of trench openings in the insulating layer, wherein theplurality of trench openings comprises a first trench opening having afirst width, and a second trench opening having a second width, which isgreater than the first width; depositing a first layer of liner materialto form a first liner layer on sidewall and bottom surfaces of the firstand second trench openings; depositing a first layer of metallicmaterial to fill the first trench opening with metallic material,wherein the metallic material within the first trench opening comprisesa first metallic line; forming an etch protection layer over the firstlayer of metallic material; patterning the etch protection layer toremove a portion of the etch protection layer which covers the secondtrench opening and expose the portion of the first layer of metallicmaterial within the second trench opening; performing an etch process toremove a portion of the first layer of metallic material within thesecond trench opening, while the etch protection layer protects themetallic material within the first trench opening from being etchedduring the etch process; and depositing a second layer of metallicmaterial to fill the second trench opening with metallic material,wherein the metallic material within the second trench opening comprisesa second metallic line; wherein the metallic material of the secondlayer of metallic material is different from the metallic material ofthe first layer of metallic material.
 16. The method of claim 15,wherein the first layer of metallic material comprises cobalt and thesecond layer of metallic material comprises copper.
 17. The method ofclaim 15, wherein the first layer of metallic material comprisesruthenium and the second layer of metallic material comprises copper.18. The method of claim 15, wherein the first width is about 20 nm orless and wherein the second width is at least two times greater than thefirst width.
 19. The method of claim 15, further comprising depositing asecond layer of liner material to form a second liner layer on the firstliner layer on the sidewall and bottom surfaces of the second trenchopening, prior to depositing the second layer of metallic material. 20.The method of claim 19, further comprising depositing a metallic seedlayer on the second liner layer in the second trench opening, prior todepositing the second layer of metallic material.